Modeling and verifying non-linearities in heterodyne displacement interferometry

The non-linearities in a heterodyne laser interferometer system occurring from the phase measurement system of the interferometer and from non-ideal polarization effects of the optics are modeled into one analytical expression which includes the initial polarization state of the laser source, the ro...

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Bibliographic Details
Published in:Precision engineering 2002-10, Vol.26 (4), p.448-455
Main Authors: Cosijns, S.J.A.G., Haitjema, H., Schellekens, P.H.J.
Format: Article
Language:English
Subjects:
Heterodyning
Interferometry
Laser applications
Light polarization
Mathematical models
Non-linearities
Optical beam splitters
Refractive index
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Summary:The non-linearities in a heterodyne laser interferometer system occurring from the phase measurement system of the interferometer and from non-ideal polarization effects of the optics are modeled into one analytical expression which includes the initial polarization state of the laser source, the rotational alignment of the beam splitter along with different transmission coefficients for polarization states and the rotational misalignment of the receiving polarizer. The model is verified using a Babinet Soleil Compensator allowing a common path for both polarization states and thereby reducing the influence of the refractive index of air. The verification shows an agreement of the model with measurements with a standard deviation of 0.2 nm. With the use of the model it is confirmed that the mean of two polarizer receivers can reduce the effect of non-linearity. However, depending on the accuracy of the polarizer angles, a second-order non-linearity remains. Also the effect of rotational misalignment of the beam splitter can not be reduced in this way.
ISSN:0141-6359
1873-2372
DOI:10.1016/S0141-6359(02)00150-2