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Micromachined components made from silicon have graduated from being technological wizardry to being important for a range of practical applications. A survey of the latest advances show that silicon micromachined chips now offer real benefits in many areas ranging from low-cost sensors for domestic...

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Bibliographic Details
Published in:Physics world 1995-11, Vol.8 (11), p.47-51
Main Authors: Rudolf, Felix, Van Den Vlekkert, Hans, Degrauwe, Marc
Format: Article
Language:English
Subjects:
Crystal defects
Etching
Integrated circuits
Mechanical properties
Micromachining
Microstructure
Silicon sensors
Technology
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Summary:Micromachined components made from silicon have graduated from being technological wizardry to being important for a range of practical applications. A survey of the latest advances show that silicon micromachined chips now offer real benefits in many areas ranging from low-cost sensors for domestic applications to key components of large machines. In each application much specific knowledge is needed to decide on the right system partitioning, the system design, in particular for the detailed microstructure design, and the packaging and dedicated electronics. Development cost and time are expected to be reduced with the emergence of standard technologies.
ISSN:0953-8585
2058-7058
DOI:10.1088/2058-7058/8/11/29