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EELS microanalysis of polycrystalline silicon thin films for solar cells grown at low temperatures

The aim of this work is the quantitative chemical analysis of polycrystalline silicon thin films grown on glass substrates at temperatures

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Bibliographic Details
Published in:Solar energy materials and solar cells 2000-07, Vol.63 (2), p.177-184
Main Authors: Stöger, Michael, Nelhiebel, Michael, Schattschneider, Peter, Schlosser, Viktor, Breymesser, Alexander, Jouffrey, Bernard
Format: Article
Language:English
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Summary:The aim of this work is the quantitative chemical analysis of polycrystalline silicon thin films grown on glass substrates at temperatures
ISSN:0927-0248
1879-3398
DOI:10.1016/S0927-0248(99)00172-5