Electron cyclotron resonance devices with permanent magnets for production of large-diameter uniform plasmas

A review is presented of experimental devices with permanent magnets for electron cyclotron resonance to produce large-diameter uniform plasmas. The devices are classified into 7 groups depending on device symmetry, magnet arrangement, plasma-drift direction and microwave coupling. Their characteris...

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Bibliographic Details
Published in:JPN J APPL PHYS PART 1 REGUL PAP SHORT NOTE REV PAP 1994, Vol.33 (7B), p.4221-4225
Main Authors: IIZUKA, S, SATO, N
Format: Article
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Cyclotron resonance
Electric currents
Electron devices
Electron resonance
Exact sciences and technology
Materials science
Microwaves
Other topics in materials science
Permanent magnets
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma flow
Plasma production and heating
Plasma sources
Solenoids
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Summary:A review is presented of experimental devices with permanent magnets for electron cyclotron resonance to produce large-diameter uniform plasmas. The devices are classified into 7 groups depending on device symmetry, magnet arrangement, plasma-drift direction and microwave coupling. Their characteristic points are clarified and the most optimal device construction and arrangement are discussed from a viewpoint of producing uniform plasmas necessary for large-scale plasma processing.
ISSN:0021-4922
1347-4065
DOI:10.1143/jjap.33.4221