Layer-by-layer design method for soft-x-ray multilayers

A new design method effective for a nontransparent system has been developed for soft-x-ray multilayers with the aid of graphic representation of the complex amplitude reflectance in a Gaussian plane. The method provides an effective means of attaining the absolute maximum reflectance on a layer-by-...

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Bibliographic Details
Published in:Applied optics (2004) 1992-04, Vol.31 (10), p.1622-1630
Main Authors: Yamamoto, M, Namioka, T
Format: Article
Language:English
Online Access:Get full text
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Summary:A new design method effective for a nontransparent system has been developed for soft-x-ray multilayers with the aid of graphic representation of the complex amplitude reflectance in a Gaussian plane. The method provides an effective means of attaining the absolute maximum reflectance on a layer-by-layer basis and also gives clear insight into the evolution of the amplitude reflectance on a multilayer as it builds up. An optical criterion is derived for the selection of a proper pair of materials needed for designing a high-reflectance multilayer. Some examples are given to illustrate the usefulness of this design method.
ISSN:1559-128X
DOI:10.1364/AO.31.001622