Oxygen-ion beam polishing of a 5-cm-diameter diamond film

A 5-cm diameter, 1-microm (peak to valley) rough diamond film has been polished to optical quality by an oxygen-ion beam. The rms and peak-to-valley roughness values of the polished surface have been lowered to 5.5 and 55.4 nm, respectively. Reactive ion beam polishing provides a low-temperature (14...

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Bibliographic Details
Published in:Applied optics (2004) 1992-05, Vol.31 (13), p.2366-2369
Main Authors: Bovard, B G, Zhao, T, Macleod, H A
Format: Article
Language:English
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Summary:A 5-cm diameter, 1-microm (peak to valley) rough diamond film has been polished to optical quality by an oxygen-ion beam. The rms and peak-to-valley roughness values of the polished surface have been lowered to 5.5 and 55.4 nm, respectively. Reactive ion beam polishing provides a low-temperature (140 degrees C), noncontact, and precisely controllable approach to improving the surface quality of diamond films. This progress is essential to the use of diamond coatings in optical applications.
ISSN:1559-128X
DOI:10.1364/AO.31.002366