Application of cooled spatial light modulator for high power nanosecond laser micromachining

The application of a commercially available spatial light modulator (SLM) to control the spatial intensity distribution of a nanosecond pulsed laser for micromachining is described for the first time. Heat sinking is introduced to increase the average power handling capabilities of the SLM beyond re...

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Bibliographic Details
Published in:Optics express 2010-08, Vol.18 (16), p.17059-17065
Main Authors: Beck, Rainer J, Parry, Jonathan P, MacPherson, William N, Waddie, Andrew, Weston, Nick J, Shephard, Jonathan D, Hand, Duncan P
Format: Article
Language:English
Subjects:
Algorithms
Equipment Design
Fourier Analysis
Lasers
Light
Microtechnology - instrumentation
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Description
Summary:The application of a commercially available spatial light modulator (SLM) to control the spatial intensity distribution of a nanosecond pulsed laser for micromachining is described for the first time. Heat sinking is introduced to increase the average power handling capabilities of the SLM beyond recommended limits by the manufacturer. Complex intensity patterns are generated, using the Inverse Fourier Transform Algorithm, and example laser machining is demonstrated. The SLM enables both complex beam shaping and also beam steering.
ISSN:1094-4087
1094-4087
DOI:10.1364/OE.18.017059