Structural Transformations of PZT 53/47 Sol-Gel Films on Different Substrates Driven by Thermal Treatments

PbZr 0.53 Ti 0.47 O 3 (PZT) thin films were obtained by sol-gel synthesis, deposited by spin coating on ITO-coated float glass and Si wafer, and subjected to different thermal treatments. Their thermal structural evolutions have been studied by X-ray diffraction (XRD), scanning electron microscopy (...

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Bibliographic Details
Published in:Ferroelectrics 2010-01, Vol.396 (1), p.49-59
Main Authors: Bruno, Emanuela, Ciuchi, Federica, Castriota, Marco, Marino, Salvatore, Nicastro, Gaetano, Cazzanelli, Enzo, Scaramuzza, Nicola
Format: Article
Language:English
Subjects:
Annealing
Atomic force microscopy (AFM)
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Cross-disciplinary physics: materials science
rheology
Dielectric thin films
Dielectrics, piezoelectrics, and ferroelectrics and their properties
Diffraction
Electron microscopy
Exact sciences and technology
Ferroelectric materials
Ferroelectric properties
Ferroelectrics
Glass substrates
Interfaces
Lead zirconate titanates
Liquid phase epitaxy
deposition from liquid phases (melts, solutions, and surface layers on liquids)
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Nanostructure
Perovskites
Physics
Scanning electron microscopy
Silicon substrates
Sol gel process
Studies
Temperature
Thin films
X-ray diffraction
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Summary:PbZr 0.53 Ti 0.47 O 3 (PZT) thin films were obtained by sol-gel synthesis, deposited by spin coating on ITO-coated float glass and Si wafer, and subjected to different thermal treatments. Their thermal structural evolutions have been studied by X-ray diffraction (XRD), scanning electron microscopy (SEM), and atomic force microscopy (AFM). The growth of ferroelectric perovskite phase, occurring for the highest annealing temperatures, depends on the substrate, being observed only on ITO substrate, while pyroclore phase, not ferroelectric, grows on Si substrates. The electrical properties of the perovskite phase have been investigated, on the nanoscale, by using electric force microscopy (EFM). It reveals asymmetric responses for induced polarization persistence, which can be related to phenomena of intrinsic polarization regarding the films, which changes as a function of the annealing temperature and of the duration of the annealing processes.
ISSN:0015-0193
1563-5112
DOI:10.1080/00150191003795189