Gold nanoparticles by soft UV nanoimprint lithography coupled to a lift-off process for plasmonic sensing of antibodies

In this paper, we present the results of gold nanoparticles fabrication on large area by soft UV nanoimprint lithography (UV-NIL) and lift-off process for antibodies sensing. For this fabrication, the hard polydimethylsiloxane (H-PDMS) is used as flexible mold material. A simple AMONIL/PMMA bilayer...

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Bibliographic Details
Published in:Microelectronic engineering 2010-05, Vol.87 (5), p.1001-1004
Main Authors: Barbillon, G., Hamouda, F., Held, S., Gogol, P., Bartenlian, B.
Format: Article
Language:English
Subjects:
Antibodies
Applied sciences
Biosensors
Cross-disciplinary physics: materials science
rheology
Detection
Electronics
Exact sciences and technology
Gold
Hard PDMS
Lithography
Localized surface plasmon resonance
Materials science
Methods of nanofabrication
Microelectronic fabrication (materials and surfaces technology)
Nanocomposites
Nanomaterials
Nanoparticles
Nanopowders
Nanoscale materials and structures: fabrication and characterization
Nanoscale pattern formation
Nanostructure
Physics
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Surface treatments
UV-NIL
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Summary:In this paper, we present the results of gold nanoparticles fabrication on large area by soft UV nanoimprint lithography (UV-NIL) and lift-off process for antibodies sensing. For this fabrication, the hard polydimethylsiloxane (H-PDMS) is used as flexible mold material. A simple AMONIL/PMMA bilayer is used to transfer patterns by etching the substrate with a suitable RIE process. The UV-NIL process has enabled to obtain gold nanoparticles with a diameter about 160 nm on a zone of 1 mm 2. For bioplasmonic applications, the sensing of Anti-Biotin was studied.
ISSN:0167-9317
1873-5568
DOI:10.1016/j.mee.2009.11.114