Optical characterization of micro and nanomechanical systems in two dimensions

A simple optical setup combining interferometric and knife-edge methods is proposed for deflection measurements and sensing both out-of-plane and in-plane movements of MEMS and NEMS devices. The setup has 100 pm/√Hz in-plane measurement resolution for 1 μm full-width-half-maximum spot size illuminat...

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 2009-11, Vol.156 (1), p.217-221
Main Authors: Seren, Hüseyin Rahmi, Ürey, Hakan
Format: Article
Language:English
Subjects:
Actuators
Illumination
Interferometry
Knife-edge
Knife-edge technique
Micro/nanomechanical displacement detection
Movements
Nanocomposites
Nanomaterials
Nanostructure
Sensors
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Summary:A simple optical setup combining interferometric and knife-edge methods is proposed for deflection measurements and sensing both out-of-plane and in-plane movements of MEMS and NEMS devices. The setup has 100 pm/√Hz in-plane measurement resolution for 1 μm full-width-half-maximum spot size illumination and 4 pm/√Hz out-of-plane resolution. The sensor offers large dynamic range. Sensor setup can also be used to measure and differentiate combined modes in some cases.
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2009.02.014