Octree-search Kinetic Monte Carlo

We present a Kinetic Monte Carlo (KMC) method based on an octree data representation and search algorithm for the simulation of complex Micro Electro Mechanical Systems (MEMS) structures and, in general, complex, multi-valued surfaces propagating in 3D space. The experimental etch rate distribution...

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 2010-04, Vol.159 (1), p.64-68
Main Authors: Gosálvez, M.A., Xing, Y., Sato, K., Nieminen, R.M.
Format: Article
Language:English
Subjects:
[formula omitted]-fold method
[formula omitted]-level search
Algorithms
Computer simulation
Etching
Growth
Kinetic Monte Carlo
Mathematical models
Monte Carlo methods
Octree
Propagation
Searching
Surface processing
Three dimensional
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Summary:We present a Kinetic Monte Carlo (KMC) method based on an octree data representation and search algorithm for the simulation of complex Micro Electro Mechanical Systems (MEMS) structures and, in general, complex, multi-valued surfaces propagating in 3D space. The experimental etch rate distribution for a wet etched spherical sample is correctly described and the propagation of the surface is in good agreement with the experiments for various applications. The algorithm leads to a faster tree-based search, efficient updating and good modeling ability for dynamic surfaces. Speedup factors of 3–4 over similar methods are obtained while the use of memory is reduced by 50–80% with respect to standard practice, with the factor increasing for larger simulations.
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2010.02.003