Optical properties and environmental stability of oxide coatings deposited by reactive sputtering

Refractory metal-oxide coatings are deposited by reactive dc magnetron sputtering in an oxygen environment. The optical constants and the environmental stability of silicon oxide, aluminium oxide, hafnium oxide, zirconium oxide, tantalum oxide, titanium oxide, and a blend of hafnium oxide with silic...

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Bibliographic Details
Published in:Applied optics (2004) 1993-10, Vol.32 (28), p.5601-5605
Main Authors: Edlou, S M, Smajkiewicz, A, Al-Jumaily, G A
Format: Article
Language:English
Online Access:Get full text
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Summary:Refractory metal-oxide coatings are deposited by reactive dc magnetron sputtering in an oxygen environment. The optical constants and the environmental stability of silicon oxide, aluminium oxide, hafnium oxide, zirconium oxide, tantalum oxide, titanium oxide, and a blend of hafnium oxide with silicon oxide are investigated. Properties of both single-layer and multilayer interference filters are examined.
ISSN:1559-128X
DOI:10.1364/AO.32.005601