Soft-x-ray projection imaging with a 1:1 ring-field optic

A molybdenum/silicon multilayer-coated 1:1 ring-field optic with a numerical aperture of 0.0835 is used to carry out soft-x-ray projection imaging with undulator radiation at 12.9 nm. An ideal optic of this type should be able to image 0.1-µm features with a contrast exceeding 90% at this wavelength...

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Bibliographic Details
Published in:Applied optics (2004) 1993-12, Vol.32 (34), p.7072-7078
Main Authors: Macdowell, A A, Bjorkholm, J E, Early, K, Freeman, R R, Himel, M D, Mulgrew, P P, Szeto, L H, Taylor, D W, Tennant, D M, Wood Ii, O R, Bokor, J, Eichner, L, Jewell, T E, Waskiewicz, W K, White, D L, Windt, D L, D'Souza, R M, Silfvast, W T, Zernike, F
Format: Article
Language:English
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Summary:A molybdenum/silicon multilayer-coated 1:1 ring-field optic with a numerical aperture of 0.0835 is used to carry out soft-x-ray projection imaging with undulator radiation at 12.9 nm. An ideal optic of this type should be able to image 0.1-µm features with a contrast exceeding 90% at this wavelength. The useful resolution of our ring-field optic is experimentally found to be approximately 0.2 µm, probably because of the presence of substrate figuring errors.
ISSN:1559-128X
DOI:10.1364/AO.32.007072