Silicon technology‐based micro‐systems for atomic force microscopy/photon scanning tunnelling microscopy

We developed silicon nitride cantilevers integrating a probe tip and a wave guide that is prolonged on the silicon holder with one or two guides. A micro‐system is bonded to a photodetector. The resulting hybrid system enables us to obtain simultaneously topographic and optical near‐field images. Ex...

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Bibliographic Details
Published in:Journal of microscopy (Oxford) 2001-04, Vol.202 (1), p.34-38
Main Authors: Gall‐Borrut, P., Belier, B., Falgayrettes, P., Castagne, M., Bergaud, C., Temple‐Boyer, P.
Format: Article
Language:English
Subjects:
Microfabricated silicon and silicon nitride cantilever
near‐field optical microscopy
photodiode
wave‐guide
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Summary:We developed silicon nitride cantilevers integrating a probe tip and a wave guide that is prolonged on the silicon holder with one or two guides. A micro‐system is bonded to a photodetector. The resulting hybrid system enables us to obtain simultaneously topographic and optical near‐field images. Examples of images obtained on a longitudinal cross‐section of an optical fibre are shown.
ISSN:0022-2720
1365-2818
DOI:10.1046/j.1365-2818.2001.00802.x