Evidence of vacuum between buckled films and their substrates

Closed-buckling structures have been opened by a focus ion beam process. Atomic force microscopy investigations prior to and after the opening have evidenced a significant increase of the maximum deflection of the buckling structures. These experimental results have been discussed in the framework o...

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Bibliographic Details
Published in:Thin solid films 2010-07, Vol.518 (18), p.5233-5236
Main Authors: Coupeau, C., Grilhé, J., Dion, E., de Morais, L. Dantas, Colin, J.
Format: Article
Language:English
Subjects:
Atomic force microscopy
Atomic structure
Buckling
Condensed matter: structure, mechanical and thermal properties
Deflection
Delaminating
Elasticity
Exact sciences and technology
Ion beams
Mechanical and acoustical properties
Mechanical behaviour
Mechanical properties
Physical properties of thin films, nonelectronic
Physics
Stress
Structure and morphology
thickness
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
Thin films
Thin plates
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Summary:Closed-buckling structures have been opened by a focus ion beam process. Atomic force microscopy investigations prior to and after the opening have evidenced a significant increase of the maximum deflection of the buckling structures. These experimental results have been discussed in the framework of the Föppl–Von Karman theory of thin plates and are interpreted in terms of the existence of vacuum between the delaminated film and the substrate. The critical stress for buckling to occur is consequently modified taking into account this pressure mismatch.
ISSN:0040-6090
1879-2731
DOI:10.1016/j.tsf.2010.04.026