Synthesis and characterization of cubic BC2N grown by reactive laser ablation

Cubic boron-carbon-nitrogen c-BC2N films were synthesized in a laser ablation system using a target of B4C with 99.99% of purity and silicon substrates (111). The discharge atmosphere for the films growth was a CH4 +N2 mixture. The substrate temperature increased from room temperature to 650A degree...

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Bibliographic Details
Published in:Surface & coatings technology 2010-09, Vol.204 (24), p.4051-4056
Main Authors: CASTILLO, H. A, ARANGO, P. J, VELEZ, J. M, RESTREPO-PARRA, E, SOTO, G, DE LA CRUZ, W
Format: Article
Language:English
Subjects:
Auger electron spectroscopy
Chemical bonds
Coatings
Cross-disciplinary physics: materials science
rheology
Discharge
Exact sciences and technology
Laser ablation
Materials science
Physics
Silicon substrates
Surface treatments
Transmission electron microscopy
X-ray diffraction
X-ray photoelectron spectroscopy
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Summary:Cubic boron-carbon-nitrogen c-BC2N films were synthesized in a laser ablation system using a target of B4C with 99.99% of purity and silicon substrates (111). The discharge atmosphere for the films growth was a CH4 +N2 mixture. The substrate temperature increased from room temperature to 650A degree C. The chemical composition and bonding configuration were studied by X-ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy (AES), finding B-N, B-C and C-C bonds. Moreover, the crystallographic microstructure was analyzed by means of X ray diffraction (XRD) and transmission electron microscopy (TEM), showing the presence of (111), (200) and (220) planes belonging to a diamond like cubic structure. Finally, an increase in the coating hardness as a function of the substrate temperature was observed, especially for temperatures higher than 530A degree C.
ISSN:0257-8972
1879-3347
DOI:10.1016/j.surfcoat.2010.05.025