Essential experimental parameters for quantitative structure analysis using spherical aberration-corrected HAADF-STEM

The accuracy of quantitative analysis for Z-contrast images with a spherical aberration ( C s) corrected high-angle annular dark-field (HAADF) scanning transmission electron microscope (STEM) using SrTiO 3(0 0 1) was systematically investigated. Atomic column and background intensities were measured...

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Bibliographic Details
Published in:Ultramicroscopy 2010-04, Vol.110 (5), p.555-562
Main Author: Kotaka, Yasutoshi
Format: Article
Language:English
Subjects:
Aberration
Brightness
Cs-corrected STEM
Digital imaging
HAADF-STEM
Mathematical analysis
Quantitative analysis
Scanning electron microscopy
Scanning transmission electron microscopy
Z-contrast
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Summary:The accuracy of quantitative analysis for Z-contrast images with a spherical aberration ( C s) corrected high-angle annular dark-field (HAADF) scanning transmission electron microscope (STEM) using SrTiO 3(0 0 1) was systematically investigated. Atomic column and background intensities were measured accurately from the experimental HAADF-STEM images obtained under exact experimental condition. We examined atomic intensity ratio dependence on experimental conditions such as defocus, convergent semi-angles, specimen thicknesses and digitalized STEM image acquisition system: brightness and contrast. In order to carry out quantitative analysis of C s-corrected HAADF-STEM, it is essential to determine defocus, to measure specimen thickness and to fix setting of brightness, contrast and probe current. To confirm the validity and accuracy of the experimental results, we compared experimental and HAADF-STEM calculations based on the Bloch wave method.
ISSN:0304-3991
1879-2723
DOI:10.1016/j.ultramic.2009.12.008