Optical properties of bismuth niobate thin films studied by spectroscopic ellipsometry

We performed optical analysis of bismuth niobate thin films using spectroscopic ellipsometry (SE). The films were grown on Pt/Ti/SiO 2/Si substrates with pulsed laser deposition. Six films were prepared using various deposition temperatures and thermal-annealing times. The room-temperature SE spectr...

Full description

Saved in:
Bibliographic Details
Published in:Thin solid films 2010-09, Vol.518 (22), p.6526-6530
Main Authors: Kang, Y.J., Ghong, T.H., Jung, Y.W., Byun, J.S., Kim, S., Kim, Y.D., Seong, T.-G., Cho, K.-H., Nahm, S.
Format: Article
Language:English
Subjects:
Annealing
Bismuth
Busmuth neobate
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Cross-disciplinary physics: materials science
rheology
Deposition
Ellipsometry
Exact sciences and technology
Laser deposition
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Niobates
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
Optical properties of specific thin films
Optical property
Physics
Spectroscopic analysis
Spectroscopy
Thin films
Titanium
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:We performed optical analysis of bismuth niobate thin films using spectroscopic ellipsometry (SE). The films were grown on Pt/Ti/SiO 2/Si substrates with pulsed laser deposition. Six films were prepared using various deposition temperatures and thermal-annealing times. The room-temperature SE spectra of these films were measured by a rotating-analyzer ellipsometer from 1.12 to 6.52 eV at incidence angles of 50, 55, 60, 65, and 70°. The resulting refractive indices and extinction coefficients show significant changes with deposition temperature and thermal annealing.
ISSN:0040-6090
1879-2731
DOI:10.1016/j.tsf.2010.01.053