Transparent conducting Al and Y codoped ZnO thin film deposited by DC sputtering

Transparent conducting Al and Y codoped zinc oxide (AZOY) thin films with high transparency and low resistivity were deposited by DC magnetron sputtering. The effects of substrate temperature on the structural, electrical and optical properties of AZOY thin films deposited on glass substrates have b...

Full description

Saved in:
Bibliographic Details
Published in:Materials chemistry and physics 2010-09, Vol.123 (1), p.300-303
Main Authors: Tsai, Yu-Zen, Wang, Na-Fu, Tseng, Mei-Rurng, Hsu, Feng-Hao
Format: Article
Language:English
Subjects:
Aluminum
Conduction
Deposition
Diffraction
Direct current
Electrical properties
Electrical resistivity
Magnetron sputtering
Sputtering
Thin films
Zinc oxide
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Transparent conducting Al and Y codoped zinc oxide (AZOY) thin films with high transparency and low resistivity were deposited by DC magnetron sputtering. The effects of substrate temperature on the structural, electrical and optical properties of AZOY thin films deposited on glass substrates have been investigated. X-ray diffraction spectra indicate that no diffraction peak of Al 2O 3 or Y 2O 3 except that of ZnO (0 0 2) is observed. The AZOY thin film prepared at substrate temperature of 250 °C has the optimal crystal quality inferring from FWHM of ZnO (0 0 2) diffraction peak, but the AZOY thin film deposited at 300 °C has the lowest resistivity of 3.6 × 10 −4 Ω-cm, the highest mobility of 30.7 cm 2 V −1 s −1 and the highest carrier concentration of 5.6 × 10 20 cm −3. The films obtained have disorderly polyhedral surface morphology indicating possible application in thin film solar cell with good quality and high haze factor without the need of post-deposition etching.
ISSN:0254-0584
1879-3312
DOI:10.1016/j.matchemphys.2010.04.015