Physical properties characterization of WO3 films grown by hot-filament metal oxide deposition

• Published in: Materials science & engineering. B, Solid-state materials for advanced technology Solid-state materials for advanced technology, 2010-10, Vol.174 (1-3), p.182-186
• Main Authors: Diaz-Reyes, J, Delgado-Macuil, R J, Dorantes-Garcia, V, Perez-Benitez, A, Balderas-Lopez, JA, Ariza-Ortega, JA
• Format: Article
• Language: English
• Subjects: Barometric pressure; Bending; Deposition; Lattice vibration; Metal oxides; Stretching; Tungsten; Tungsten oxides; Vibration
• ISSN: 0921-5107
• DOI: 10.1016/j.mseb.2010.03.061

WO3 is grown by hot-filament metal oxide deposition (HFMOD) technique under atmospheric pressure and an oxygen atmosphere. By X-ray diffraction obtains that WO3 presents mainly monoclinic crystalline phase. The chemical stoichiometry is obtained by X-ray Photoelectron Spectroscopy (XPS). The IR spectrum of the as-grown WO3 presents broad peaks in the range of 1100 to 3600cma1. A broad band in the 2200 to 3600cma1 region and the peaks sited at 1645 and 1432cma1 are well resolved, which are originated from moisture and are assigned to I[frac12](OH) and I(OH) modes of adsorbed water and the corresponding tungsten oxide vibrations are in infrared region from 400 to 1453cma1 and around 3492cma1, which correspond to tungsten-oxygen (W-O) stretching, bending and lattice modes. The Raman spectrum shows intense peaks at 801, 710, 262 and 61cma1 that are typical Raman peaks of crystalline WO3 (m-phase) that correspond to stretching vibrations of the bridging oxygen, which are assigned to W-O stretching (I[frac12]) and W-O bending (I) modes, respectively. By transmittance measurements obtains that the WO3 band gap can be varied from 2.92 to 3.13eV in the investigated annealing temperature range.