Determination of subnanogram per cubic meter concentrations of metals in the air of a trace metal clean room by impaction graphite furnace atomic absorption and laser excited atomic fluorescence spectrometry

• Published in: Analytical chemistry (Washington) 1990-07, Vol.62 (14), p.1452-1457
• Main Authors: Liang, Zhongwen, Wei, Guor Tzo, Irwin, Richard L, Walton, Andrew P, Michel, Robert G, Sneddon, Joseph
• Format: Article
• Language: English
• Subjects: Air - analysis; Metals - analysis; Microchemistry; Particle Size; Quality Control; Spectrophotometry, Atomic
• ISSN: 0003-2700; 1520-6882
• DOI: 10.1021/ac00213a020

Air, drawn by vacuum through a jet, was impacted against the inside surface of an atomic absorption graphite electrothermal atomizer (ETA). The amounts of the particles thus collected were determined at the ng m-3 level by graphite furnace atomic absorption or at the pg m-3 level by laser excited atomic fluorescence. The overall reproducibility of two sets of measurements, made 7 months apart, was 23%, with no significant difference between the two sets of data, based on Student's "t" test at the 95% confidence level. Short-term reproducibility varied from 13% to 34% depending upon the air concentration of the metal. The method shows promise for monitoring long-term effectiveness of the filtering systems in trace metal clean rooms. It was not possible to test for accuracy, due to the low concentrations involved, but accuracy was expected to be within a factor of 2 or 3 of the actual value, based on theoretical aspects of impaction.