Passive Limitations for a Magnetic Gravity Compensator

The development of sophisticated advanced vibration isolation is important because even the minutest vibrations have disastrous effects on the performance of static and moving parts in high-precision machines. This paper concerns with the isolation of these vibrations for a large static body in an a...

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Bibliographic Details
Published in:Journal of System Design and Dynamics 2009, Vol.3(4), pp.671-680
Main Authors: JANSSEN, Jeroen L. G., PAULIDES, Johannes J. H., LOMONOVA, Elena A.
Format: Article
Language:English
Subjects:
Compensation
Density
Dynamical systems
Dynamics
Electromagnets
Gravitation
Gravity Compensation
Levitation
Magnetic
Mathematical models
Permanent Magnet
Permanent magnets
Suspension
Vibration
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Summary:The development of sophisticated advanced vibration isolation is important because even the minutest vibrations have disastrous effects on the performance of static and moving parts in high-precision machines. This paper concerns with the isolation of these vibrations for a large static body in an advanced micro-lithographic system, where a passive/active electromagnetic solution is presented. In these configurations passive permanent magnets (PM) provide the gravity compensation and active electromagnets the accurate positioning. This paper only considers the applicability of a passive magnetic solution for this high force gravity compensation application, or, more specifically, the influence of various PM array topologies on the force density. Further, fast-solving analytical models are presented and consequently are used to illustrate the feasibility of using passive permanent magnets for gravity compensation in this demanding high precision industrial application.
ISSN:1881-3046
1881-3046
DOI:10.1299/jsdd.3.671