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Thermally processed titanium oxides film on Si(0 0 1) surface studied with scanning tunneling microscopy/spectroscopy

Thermal structural changes of TiO x films built on a Si(0 0 1) surface were investigated at the nanometer scale with scanning tunneling microscopy. Electronic properties of individual clusters were classified by means of scanning tunneling spectroscopy. The differential conductance (d I/d V) near th...

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Bibliographic Details
Published in:Applied surface science 2010-12, Vol.257 (5), p.1672-1677
Main Authors: Aoki, T., Shudo, K., Sato, K., Ohno, S., Tanaka, M.
Format: Article
Language:English
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Summary:Thermal structural changes of TiO x films built on a Si(0 0 1) surface were investigated at the nanometer scale with scanning tunneling microscopy. Electronic properties of individual clusters were classified by means of scanning tunneling spectroscopy. The differential conductance (d I/d V) near the Fermi energy showed that nano-clusters were transformed from semiconducting Ti-silicates into metallic Ti-silicides after heating to 970 K. Peaks of normalized differential conductance (d I/d V/( I/ V)) of the clusters shifted after heating to about 1070 K, indicating exclusion of oxygen from the clusters.
ISSN:0169-4332
1873-5584
DOI:10.1016/j.apsusc.2010.08.120