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Thermally processed titanium oxides film on Si(0 0 1) surface studied with scanning tunneling microscopy/spectroscopy
Thermal structural changes of TiO x films built on a Si(0 0 1) surface were investigated at the nanometer scale with scanning tunneling microscopy. Electronic properties of individual clusters were classified by means of scanning tunneling spectroscopy. The differential conductance (d I/d V) near th...
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Published in: | Applied surface science 2010-12, Vol.257 (5), p.1672-1677 |
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Main Authors: | , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | Thermal structural changes of TiO
x
films built on a Si(0
0
1) surface were investigated at the nanometer scale with scanning tunneling microscopy. Electronic properties of individual clusters were classified by means of scanning tunneling spectroscopy. The differential conductance (d
I/d
V) near the Fermi energy showed that nano-clusters were transformed from semiconducting Ti-silicates into metallic Ti-silicides after heating to 970
K. Peaks of normalized differential conductance (d
I/d
V/(
I/
V)) of the clusters shifted after heating to about 1070
K, indicating exclusion of oxygen from the clusters. |
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ISSN: | 0169-4332 1873-5584 |
DOI: | 10.1016/j.apsusc.2010.08.120 |