Ultra-high resolution zone-doubled diffractive X-ray optics for the multi-keV regime

X-ray microscopy based on Fresnel zone plates is a powerful technique for sub-100 nm resolution imaging of biological and inorganic materials. Here, we report on the modeling, fabrication and characterization of zone-doubled Fresnel zone plates for the multi-keV regime (4-12 keV). We demonstrate unp...

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Bibliographic Details
Published in:Optics express 2011-01, Vol.19 (1), p.175-184
Main Authors: Vila-Comamala, Joan, Gorelick, Sergey, Färm, Elina, Kewish, Cameron M, Diaz, Ana, Barrett, Ray, Guzenko, Vitaliy A, Ritala, Mikko, David, Christian
Format: Article
Language:English
Subjects:
Equipment Design
Lenses
Microscopy - instrumentation
Microscopy - methods
Microscopy, Electron, Scanning Transmission - instrumentation
Microscopy, Electron, Scanning Transmission - methods
Optical Devices
Optical Phenomena
Scattering, Small Angle
X-Ray Diffraction - instrumentation
X-Ray Diffraction - methods
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Summary:X-ray microscopy based on Fresnel zone plates is a powerful technique for sub-100 nm resolution imaging of biological and inorganic materials. Here, we report on the modeling, fabrication and characterization of zone-doubled Fresnel zone plates for the multi-keV regime (4-12 keV). We demonstrate unprecedented spatial resolution by resolving 15 nm lines and spaces in scanning transmission X-ray microscopy, and focusing diffraction efficiencies of 7.5% at 6.2 keV photon energy. These developments represent a significant step towards 10 nm spatial resolution for hard X-ray energies of up to 12 keV.
ISSN:1094-4087
1094-4087
DOI:10.1364/oe.19.000175