Silicon-polymer hybrid slot waveguide ring-resonator modulator

We demonstrate a ring-resonator modulator based on a silicon-polymer hybrid slot waveguide with a tunability of 12.7 pm/V at RF speeds and a bandwidth of 1 GHz, for optical wavelengths near 1550 nm. Our slot waveguides were fabricated with 193 nm optical lithography, as opposed to the electron beam...

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Bibliographic Details
Published in:Optics express 2011-02, Vol.19 (5), p.3952-3961
Main Authors: Gould, Michael, Baehr-Jones, Tom, Ding, Ran, Huang, Su, Luo, Jingdong, Jen, Alex K-Y, Fedeli, Jean-Marc, Fournier, Maryse, Hochberg, Michael
Format: Article
Language:English
Subjects:
Equipment Design
Equipment Failure Analysis
Polymers - chemistry
Refractometry - instrumentation
Silicon - chemistry
Telecommunications - instrumentation
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Summary:We demonstrate a ring-resonator modulator based on a silicon-polymer hybrid slot waveguide with a tunability of 12.7 pm/V at RF speeds and a bandwidth of 1 GHz, for optical wavelengths near 1550 nm. Our slot waveguides were fabricated with 193 nm optical lithography, as opposed to the electron beam lithography used for previous results. The tunability is comparable to some of the best ring-based modulators making use of the plasma dispersion effect. The speed is likely limited only by resistance in the strip-loading section, and it should be possible to realize significant improvement with improved processing.
ISSN:1094-4087
1094-4087
DOI:10.1364/oe.19.003952