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Performance Optimization of Antenna-Coupled rm Al / rm AlO x / rm Pt Tunnel Diode Infrared Detectors
Signal-to-noise ratio (SNR) is a valuable figure of merit in determining the operating scope of infrared detectors. Antenna-couple metal-oxide-metal diodes have been shown to detect infrared radiation without cooling or applied bias, but so far have been hampered by their SNR. This paper details a c...
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Published in: | IEEE journal of quantum electronics 2011-01, Vol.47 (1), p.126-135 |
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Main Authors: | , , |
Format: | Article |
Language: | English |
Subjects: | |
Online Access: | Get full text |
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Summary: | Signal-to-noise ratio (SNR) is a valuable figure of merit in determining the operating scope of infrared detectors. Antenna-couple metal-oxide-metal diodes have been shown to detect infrared radiation without cooling or applied bias, but so far have been hampered by their SNR. This paper details a comprehensive study of the fabrication parameters that control the formation of the tunneling oxide barrier to optimize the performance of these detectors. Since the tunneling barrier affects both current-voltage and infrared detection characteristics, fabrication parameters can be optimized to improve device performance. The current-voltage characteristics of the devices are detailed in this paper; resistance, nonlinearity, and curvature coefficient are parameterized on fabrication procedures. Infrared detection characteristics are detailed and SNR is studied as a function of device nonlinearity and biasing conditions. |
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ISSN: | 0018-9197 1558-1713 |
DOI: | 10.1109/JQE.2010.2081971 |