Development of a bioinspired MEMS based capacitive tactile sensor for a robotic finger

This paper presents the development of a MEMS based capacitive tactile sensor intended to be incorporated into a tactile array as the core element of a biomimetic fingerpad. The use of standard microfabrication technologies in realising the device allowed a cost efficient fabrication involving only...

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 2011-02, Vol.165 (2), p.221-229
Main Authors: Muhammad, H.B., Oddo, C.M., Beccai, L., Recchiuto, C., Anthony, C.J., Adams, M.J., Carrozza, M.C., Hukins, D.W.L., Ward, M.C.L.
Format: Article
Language:English
Subjects:
Actuators
Arrays
Biomimetic
Capacitive sensor
Electronic systems
Fingers
Indentation
Low noise
MEMS
Sensors
Tactile
Tactile sensor
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Summary:This paper presents the development of a MEMS based capacitive tactile sensor intended to be incorporated into a tactile array as the core element of a biomimetic fingerpad. The use of standard microfabrication technologies in realising the device allowed a cost efficient fabrication involving only a few process steps. A low noise readout electronics system was developed for measuring the sensor response. The performance of both bare and packaged sensors was evaluated by direct probing of individual capacitive sensor units and characterising their response to load–unload indentation cycles.
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2010.10.025