Soft-Lithographic Approach to Functionalization and Nanopatterning Oxide-Free Silicon

We report a simple, reliable high-throughput method for patterning passivated silicon with reactive organic monolayers and demonstrate selective functionalization of the patterned substrates with both small molecules and proteins. The approach completely protects silicon from chemical oxidation, pro...

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Bibliographic Details
Published in:Langmuir 2011-05, Vol.27 (10), p.6478-6485
Main Authors: Shestopalov, Alexander A., Morris, Carleen J., Vogen, Briana N., Hoertz, Amanda, Clark, Robert L., Toone, Eric J.
Format: Article
Language:English
Subjects:
Acrylates - chemistry
Carboxylic Acids - chemistry
Catalysis
Chemistry
Devices and Applications: Sensors, Fluidics, Patterning, Catalysis, Photonic Crystals
Exact sciences and technology
General and physical chemistry
Hydrolysis
Nanotechnology - methods
Oxidation-Reduction
Polyurethanes - chemistry
Printing - methods
Reproducibility of Results
Silicon - chemistry
Succinimides - chemistry
Surface Properties
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Summary:We report a simple, reliable high-throughput method for patterning passivated silicon with reactive organic monolayers and demonstrate selective functionalization of the patterned substrates with both small molecules and proteins. The approach completely protects silicon from chemical oxidation, provides precise control over the shape and size of the patterned features in the 100 nm domain, and gives rapid, ready access to chemically discriminated patterns that can be further functionalized with both organic and biological molecules.
ISSN:0743-7463
1520-5827
DOI:10.1021/la200373g