Evaluation of Curing Characteristics in UV-NIL Resist

Mechanical characteristics of UV curable resist for UV nanoimprint lithography are investigated using UV rheology meter. Modulations of visco-elatic properties and thickness shrinkages in typical resists are evaluated in variation of exposure UV intensity. The mechanical modulation speed of the resi...

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Published in:Journal of Photopolymer Science and Technology 2010/06/22, Vol.23(1), pp.51-54
Main Authors: Suzuki, Ryosuke, Sakai, Nobuji, Sekiguchi, Atsushi, Matsumoto, Yoko, Tanaka, Risa, Hirai, Yoshihiko
Format: Article
Language:English
Subjects:
Conversion
conversion time
Curing
Lithography
Measuring instruments
Modulation
modulus
Nanocomposites
Nanomaterials
Nanostructure
Resists
shrinkage
UV curable resist
UV nanoimprint
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cited_by cdi_FETCH-LOGICAL-c564t-7056feab6dfc0f701731d0dc74b2d59ddd90cfdb0c4a89220f926ca3a2e0ed063
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creator Suzuki, Ryosuke
Sakai, Nobuji
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description Mechanical characteristics of UV curable resist for UV nanoimprint lithography are investigated using UV rheology meter. Modulations of visco-elatic properties and thickness shrinkages in typical resists are evaluated in variation of exposure UV intensity. The mechanical modulation speed of the resist depends on the UV intensity, which affects to throughput of UV nanoimprint lithography process. To handle the characteristics universally, effective conversion time is newly introduced, which fairly expresses the resist modifications.
doi_str_mv 10.2494/photopolymer.23.51
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source Full-Text Journals in Chemistry (Open access)
subjects Conversion
conversion time
Curing
Lithography
Measuring instruments
Modulation
modulus
Nanocomposites
Nanomaterials
Nanostructure
Resists
shrinkage
UV curable resist
UV nanoimprint
title Evaluation of Curing Characteristics in UV-NIL Resist
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