Large Area Nanoimprint Mold Fabricated by Electron Beam Stepper

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Bibliographic Details
Published in:Journal of Photopolymer Science and Technology 2010/06/22, Vol.23(1), pp.75-78
Main Authors: Okada, Makoto, Kishiro, Takashi, Yanagihara, Kaori, Ataka, Masashi, Anzawa, Norimichi, Matsui, Shinji
Format: Article
Language:English
Subjects:
electron beam stepper
Electron beams
exposure time
large area mold
Molds
Nanocomposites
Nanomaterials
Nanostructure
Photopolymers
Steppers
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Online Access:Get full text
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ISSN:0914-9244
1349-6336
1349-6336
DOI:10.2494/photopolymer.23.75