Study of (Zr,Ti)CN, (Zr,Hf)CN and (Zr,Nb)CN films prepared by reactive magnetron sputtering

• Published in: Thin solid films 2011-04, Vol.519 (12), p.4092-4096
• Main Authors: Braic, M., Balaceanu, M., Vladescu, A., Zoita, C.N., Braic, V.
• Format: Article
• Language: English
• Subjects: (Zr,Hf)CN; (Zr,Nb)CN coatings; (Zr,Ti)CN; Coatings; Composition and phase identification; Composition and structure; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Deposition by sputtering; Exact sciences and technology; Friction; Friction performance; Hardness; Magnetron sputtering; Materials science; Mechanical; Mechanical and acoustical properties; Methods of deposition of films and coatings; film growth and epitaxy; Morphology; Nanostructure; Physical properties of thin films, nonelectronic; Physics; Structure and morphology; thickness; Surface layer; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Texture; Thin film structure and morphology
• ISSN: 0040-6090; 1879-2731
• DOI: 10.1016/j.tsf.2011.01.375

(Zr,Ti)CN, (Zr,Hf)CN and (Zr,Nb)CN coatings, in which Ti, Hf and Nb were added to ZrCN base compound, have been prepared by reactive magnetron sputtering. The coatings, with two different non-metal/metal ratios, were comparatively investigated in terms of elemental and phase composition, texture, surface morphology, hardness and friction performance. It has been shown that the films exhibit nanocomposite structures, consisting of a mixture of crystalline metal carbonitride and amorphous carbon. As compared with ternary ZrCN coatings, the quaternary coatings were found to exhibit superior mechanical and friction characteristics. In general, the films with higher non-metal content revealed finer morphologies, higher hardness and lower friction coefficient. Depending on the coating type and non-metal/metal ratio, the hardness values ranged from about 21 to 29 GPa, being higher than those of ZrCN reference films. The coefficients of friction varied from 0.2 to 0.5, the lowest values being obtained for the coatings with the highest non-metal content.