Suspended Spiral Inductor and Band-Pass Filter on Thick Anodized Aluminum Oxide

• Published in: IEEE microwave and wireless components letters 2009-10, Vol.19 (10), p.620-622
• Main Authors: YOOK, Jong-Min, KIM, Kyoung-Min, KWON, Young-Se
• Format: Article
• Language: English
• Subjects: 2.45 GHz band-pass filter (BPF); Air-cavity; Aluminum; Aluminum oxide; anodized aluminum; Anodizing; Applied sciences; Band pass filters; Bandpass filters; Bandwidth; Chemicals; Circuit properties; Dielectrics; Electric, optical and optoelectronic circuits; Electronic circuits; Electronics; Exact sciences and technology; Frequency filters; high Q inductor; Inductance; Inductors; Insertion loss; Magnetic devices; Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits; Microwaves; Q factor; Q factors; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Spirals; suspended inductor
• ISSN: 1531-1309; 2771-957X; 1558-1764; 2771-9588
• DOI: 10.1109/LMWC.2009.2029735

We make suspended inductors and 2.45 GHz BPFs on the selectively anodized aluminum. The thick anodized alumina is used as the supporting dielectric and it is easily removed by using chemical wet-etching. The thickness of anodized alumina is 80 mum and the depth of the total air-cavity is 200 mum. The fabricated inductor over an air cavity has a 25% greater Q factor and 21% higher inductance at 2 GHz compared to an inductor on anodized aluminum. The 2.45 GHz BPF adjusting the suspended inductors has 2.8 dB of insertion loss with a narrow bandwidth.