Amorphous carbon contamination monitoring and process optimization for single-walled carbon nanotube integration

We detail the monitoring of amorphous carbon deposition during thermal chemical vapour deposition of carbon nanotubes and propose a contamination-less process to integrate high-quality single-walled carbon nanotubes into micro-electromechanical systems. The amorphous content is evaluated by confocal...

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Bibliographic Details
Published in:Nanotechnology 2007-02, Vol.18 (7), p.075603-075603 (6)
Main Authors: Jungen, A, Stampfer, C, Durrer, L, Helbling, T, Hierold, C
Format: Article
Language:English
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Summary:We detail the monitoring of amorphous carbon deposition during thermal chemical vapour deposition of carbon nanotubes and propose a contamination-less process to integrate high-quality single-walled carbon nanotubes into micro-electromechanical systems. The amorphous content is evaluated by confocal micro-Raman spectroscopy and by scanning/transmission electron microscopy. We show how properly chosen process parameters can lead to successful integration of single-walled nanotubes, enabling nano-electromechanical system synthesis.
ISSN:0957-4484
1361-6528
DOI:10.1088/0957-4484/18/7/075603