On the Dynamic Response of Electrostatic MEMS Switches

The undamped dynamic response of electrostatic MEMS switches that are driven by a step-function voltage is investigated. A systematic analysis using energy methods is presented. An analytic expression for switching time is derived and this expression may be used as a design rule for electrostatic sw...

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2008-02, Vol.17 (1), p.236-243
Main Authors: Leus, V., Elata, D.
Format: Article
Language:English
Subjects:
Actuators
Applied sciences
Dynamic pull-in
Dynamic response
Electrodes
Electrostatic actuators
Electrostatic analysis
Electrostatic measurements
electrostatic switches
Electrostatics
Energy methods
Exact sciences and technology
General equipment and techniques
Geometry
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mathematical analysis
Mechanical engineering. Machine design
Mechanical instruments, equipment and techniques
Microelectromechanical systems
Micromechanical devices and systems
Microswitches
Physics
Precision engineering, watch making
Switches
Testing
Time measurement
Transducers
Voltage
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Description
Summary:The undamped dynamic response of electrostatic MEMS switches that are driven by a step-function voltage is investigated. A systematic analysis using energy methods is presented. An analytic expression for switching time is derived and this expression may be used as a design rule for electrostatic switches. The analytic predictions are validated experimentally using test structures with parallel-plates actuators. It is shown that the analysis is also applicable for switches with more general geometry.
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2007.908752