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SiGeC/Si Electrooptic Modulators
The addition of carbon to silicon-germanium alloys provides the ability to lattice match thick layers with high germanium composition to silicon substrates. Thick strain-free silicon-germanium-carbon (SiGeC) layers on silicon allow the design of optical waveguides that have large optical mode overla...
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Published in: | Journal of lightwave technology 2007-03, Vol.25 (3), p.866-874 |
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Main Authors: | , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | The addition of carbon to silicon-germanium alloys provides the ability to lattice match thick layers with high germanium composition to silicon substrates. Thick strain-free silicon-germanium-carbon (SiGeC) layers on silicon allow the design of optical waveguides that have large optical mode overlap with the waveguide core. In addition, SiGeC/Si heterostructures enable strong confinement of large electron and hole concentrations. The combination of tightly confined carriers and photons can be used to realize high-performance broadband electrooptic modulators based on carrier density-induced refractive index changes. We show that modulators with lengths around 30 mum and turn-on times below 0.2 ns are possible with optimized designs |
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ISSN: | 0733-8724 1558-2213 |
DOI: | 10.1109/JLT.2006.890432 |