Micromachined Angular Rate Sensors for Automotive Applications

Micromachined angular rate sensors are key elements in several automotive systems, thus enabling highly sophisticated applications like rollover detection and mitigation, navigation systems, electronic stability program, and other future vehicle stabilizing and dynamics control systems. New automoti...

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Bibliographic Details
Published in:IEEE sensors journal 2007-02, Vol.7 (2), p.302-309
Main Authors: Neul, R., Gomez, U.-M., Kehr, K., Bauer, W., Classen, J., Doring, C., Esch, E., Gotz, S., Hauer, J., Kuhlmann, B., Lang, C., Veith, M., Willig, R.
Format: Article
Language:English
Subjects:
Angular rate sensor
Automotive applications
Automotive components
Automotive engineering
Control systems
Dynamical systems
Dynamics
Electronics
gyroscope
microelectromechanical systems (MEMS)
Micromachining
Micromechanics
Navigation
Perturbation
Sensor systems and applications
Sensors
Signal to noise ratio
Stability
Vehicle detection
Vehicle dynamics
vehicle dynamics control
Vehicles
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Summary:Micromachined angular rate sensors are key elements in several automotive systems, thus enabling highly sophisticated applications like rollover detection and mitigation, navigation systems, electronic stability program, and other future vehicle stabilizing and dynamics control systems. New automotive systems are demanding higher accuracy, better signal-to-noise ratio, higher robustness and insensitivity against external perturbations, better system availability and reliability, as well as easy application of the gyros. This paper is presenting the recent development, now the third generation, of micromachined angular rate sensors at Robert Bosch GmbH. Mass production was started in spring 2005. These surface micromachined gyroscopes exhibit outstanding performance compared to similar designs, especially in term of resolution, noise, and insensitivity against external perturbations
ISSN:1530-437X
1558-1748
DOI:10.1109/JSEN.2006.888610