A microfabricated silicon platform with 60 microfluidic chips for rapid mass spectrometric analysis

This work presents a way of using silicon microfabrication to take advantage of the rim of a silicon wafer in a novel manner. Our circular multichip platform, which is fabricated using only standard microfabrication techniques, has 60 identical miniaturized micropillar array electrospray ionization...

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Bibliographic Details
Published in:Lab on a chip 2011-09, Vol.11 (17), p.3011-3014
Main Authors: Sainiemi, Lauri, Nissilä, Teemu, Kostiainen, Risto, Ketola, Raimo A, Franssila, Sami
Format: Article
Language:English
Subjects:
Arrays
Chips
Mass spectrometers
Microfluidic Analytical Techniques - instrumentation
Miniaturization
Platforms
Rotating
Silicon
Silicon - chemistry
Spectrometry, Mass, Electrospray Ionization - instrumentation
Spectrometry, Mass, Electrospray Ionization - methods
Tables (data)
Wafers
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Summary:This work presents a way of using silicon microfabrication to take advantage of the rim of a silicon wafer in a novel manner. Our circular multichip platform, which is fabricated using only standard microfabrication techniques, has 60 identical miniaturized micropillar array electrospray ionization (μPESI) chips at the periphery of a silicon wafer. The fabricated platform is fixed on a computer controlled rotating table, in front of a mass spectrometer (MS). After each MS measurement an unused μPESI chip is aligned towards the MS by the programmable rotating table. Our wafer-scale platform enabled measurement of 60 samples in 8 minutes. The samples can also be stored on the platform for later analysis.
ISSN:1473-0197
1473-0189
DOI:10.1039/c1lc20275h