Toward quantitative core-loss EFTEM tomography

• Published in: Ultramicroscopy 2011-07, Vol.111 (8), p.1255-1261
• Main Authors: Jin-Phillipp, N.Y., Koch, C.T., van Aken, P.A.
• Format: Article
• Language: English
• Subjects: 3D elemental mapping; Approximation; Carbon; Diffraction; EFTEM; Inelastic scattering; Multiple-scattering correction; Nanomaterials; Thin films; Three dimensional; Tomography
• ISSN: 0304-3991; 1879-2723
• DOI: 10.1016/j.ultramic.2011.02.006

Core-loss EFTEM tomography provides three-dimensional structural and chemical information. Multiple inelastic scattering occurring in thick specimens as well as orientation-dependent diffraction contrast due to multiple elastic scattering, however, often limit its applications. After demonstrating the capability of core-loss EFTEM tomography to reconstruct just a few monolayers thin carbon layer covering a Fe catalyst particle we discuss its application to thicker samples. We propose an approximate multiple-scattering correction method based on the use of zero-loss images and apply it successfully to copper whiskers, providing a significant improvement of the reconstructed 3D elemental distribution. We conclude this paper by a general discussion on experimental parameters affecting the accuracy of EFTEM 3D elemental mapping. ► EFTEM 3D elemental mapping has been applied to a catalyst particle from which a CNT has grown and a copper whisker. ► Correction of multiple inelastic scattering shows significant improvements in the reconstruction of 3D elemental maps. ► Experimental parameters affecting the accuracy of EFTEM 3D elemental mapping are discussed.