A Planar High-[Formula Omitted] Micromachined Monolithic Half-Coaxial Transmission-Line Filter

In this paper, a surface micromachined high-Q planar transmission line is presented. The proposed structure is a half-coaxial transmission line on a quartz substrate. The half-coaxial transmission line has a 100-mum air gap between the half-coaxial center conductor and ground plane. The unloaded qua...

Full description

Saved in:
Bibliographic Details
Published in:IEEE transactions on microwave theory and techniques 2006-12, Vol.54 (12), p.4161
Main Authors: Llamas-Garro, I, Yongsung Kim, Yongsung Kim, Chang-Wook Baek, Chang-Wook Baek, Yong-Kweon Kim, Yong-Kweon Kim
Format: Article
Language:English
Subjects:
Etching
Ground plane
Micromachining
Micromechanics
Microwaves
Noise levels
Quality factor
Transmission lines
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:In this paper, a surface micromachined high-Q planar transmission line is presented. The proposed structure is a half-coaxial transmission line on a quartz substrate. The half-coaxial transmission line has a 100-mum air gap between the half-coaxial center conductor and ground plane. The unloaded quality factor extracted from an experimental resonator was 153 at 32 GHz. The proposed structure can be easily integrated with other components on a chip and can be used to partially isolate components, e.g., a microwave filter. A three-pole 5% fractional bandwidth filter centered at 31.75 GHz with a Chebyshev response has been designed with the proposed half-coaxial transmission line, where a measured insertion loss of 2.83 dB has been obtained. Variations in filter response due to different etch hole positions on the suspended ground plane is discussed
ISSN:0018-9480
1557-9670
DOI:10.1109/TMTT.2006.886369