Combustion synthesis of high-quality diamond film suitable for application in electronic devices

The purpose of this research is to elucidate the electrical characteristics of a diamond film synthesized by combustion flame and synthesize a diamond film suitable for application in electronic devices. When the film contains amorphous carbon, the dielectric loss increases, i.e., the electrical cha...

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Bibliographic Details
Published in:Proceedings of the Combustion Institute 2007, Vol.31 (2), p.1831-1838
Main Authors: Okumura, Yukihiko, Kanayama, Kouichi, Tabaru, Masaya, Kawabata, Satoshi
Format: Article
Language:English
Subjects:
Amorphous carbon
Carbon
Combustion
Combustion synthesis
Diamond film
Diamond films
Dielectric loss
Electrical characteristics
Electronic device application
Electronic devices
Frequency ranges
Optimization
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Summary:The purpose of this research is to elucidate the electrical characteristics of a diamond film synthesized by combustion flame and synthesize a diamond film suitable for application in electronic devices. When the film contains amorphous carbon, the dielectric loss increases, i.e., the electrical characteristics of the diamond film are degraded. We employed three methods to decrease the amorphous carbon in the diamond film—the detection of the optimal equivalence ratio, addition of hydrogen into synthesizing gas, and heat treatment (annealing) of the diamond film. All these methods can decrease the amount of amorphous carbon effectively, thus systematically changing the factors influencing the optimal synthesis for improving the electric characteristics of the film. We have successfully developed a method for preparing a high-quality diamond film with excellent electrical characteristics that has no dielectric loss in the wide frequency range (10 2–10 8 Hz).
ISSN:1540-7489
1873-2704
DOI:10.1016/j.proci.2006.08.073