Self-assembled tungsten oxide nanowires by electron beam assisted rapid thermal annealing

We report on the fabrication of WO3 nanowires on Si (100) substrate using nickel catalyzed electron beam assisted rapid thermal annealing process. A 7nm thick W layer deposited on the nickel coated substrate was annealed under high vacuum using electron beam (3keV) for 30, 60 and 90s. The nickel act...

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Bibliographic Details
Published in:Materials letters 2011-06, Vol.65 (12), p.1941-1944
Main Authors: Gopalakrishnan, C., Ganesh, K.R., Ramaswamy, S., Jeganathan, K.
Format: Article
Language:English
Subjects:
Annealing
Catalysis
Coalition
Electron beams
elemental composition
Morphology
Nanowires
Nickel
oxygen
Rapid thermal annealing
Scanning electron microscopy
silicon
Silicon substrates
Tungsten
Tungsten oxide
Tungsten oxides
XPS
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Summary:We report on the fabrication of WO3 nanowires on Si (100) substrate using nickel catalyzed electron beam assisted rapid thermal annealing process. A 7nm thick W layer deposited on the nickel coated substrate was annealed under high vacuum using electron beam (3keV) for 30, 60 and 90s. The nickel activates the growth of tungsten nanowires with a high aspect ratio and subsequently is oxidized due to the high refractory nature of tungsten under exposure to oxygen gas. The resulting changes in surface morphology, oxidization state and elemental composition of WO3 nanowires were investigated systematically. The oxidization of metallic tungsten nanowire was found to depend on the annealing time. WO3 nanowires were fabricated using a novel electron beam assisted rapid thermal annealing process. The tungsten oxide nanowires were grown by e-beam evaporation of tungsten in oxygen environment with nickel as the catalyst. The substrate was annealed using a raster scanned electron beam (3keV). The resulting changes in surface morphology, oxidization state and elemental composition of WO3 nanowires were investigated systematically. [Display omitted]
ISSN:0167-577X
1873-4979
DOI:10.1016/j.matlet.2011.03.071