Microfabricated Inductive Micropositioning Sensor for Measurement of a Linear Movement

An inductive device with a moving core will change its inductance as a function of the core position. By extending this principle to a microtransformer with multiple evenly spaced cores, a measurement system combining features of analog (variable reluctance) and incremental positioning may be devise...

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Bibliographic Details
Published in:IEEE sensors journal 2006-12, Vol.6 (6), p.1482-1487
Main Authors: Dinulovic, D., Gatzen, H.H.
Format: Article
Language:English
Subjects:
Coils
Counting
Devices
Inductance
Inductive devices
linear movement
Magnetic cores
Magnetic materials
Magnetic sensors
Mechanical sensors
microelectro-mechanical system (MEMS)
Micropositioning
micropositioning sensor
microtransformer
Movement
Offsets
Position measurement
Sensor phenomena and characterization
Sensor systems
Sensors
Soft magnetic materials
Variable reluctance
variable reluctance (VR) sensor
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Description
Summary:An inductive device with a moving core will change its inductance as a function of the core position. By extending this principle to a microtransformer with multiple evenly spaced cores, a measurement system combining features of analog (variable reluctance) and incremental positioning may be devised. For detecting the direction of motion system (to know in which direction to count), an incremental length-measurement system not only requires one, but two output signals, which have to be offset by 90deg. This paper presents a microtransformer-based positioning system fulfilling these requirements. It presents the fabrication technology employed and discusses experimental test results
ISSN:1530-437X
1558-1748
DOI:10.1109/JSEN.2006.884439