Experimental and Theoretical Investigations of Cured and Uncured Disiloxane Bisbenzocyclobutene Thin Films

The main challenge in the large-scale commercial applications of benzocyclobutene (BCB) dielectrics is to perform their curing rapidly and efficiently at low temperatures, and in the same time, to obtain large area, high quality, pinhole free dielectric thin films. For that purpose, we investigated...

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Bibliographic Details
Published in:Materials and manufacturing processes 2009-10, Vol.24 (10-11), p.1180-1184
Main Authors: Ivanovic, Nenad, Marjanovic, Nenad, Novakovic, Jasmina Grbovic, Manasijevic, Miodrag, Rakocevic, Zlatko, Andric, Velibor, Hadzic, Branka
Format: Article
Language:English
Subjects:
AFM
Atomic force microscopy
Calculations
Curing
Dielectrics
Disiloxane bisbenzocyclobutene
Infrared
Infrared radiation
IR and Raman spectroscopy
Mathematical analysis
Microscopy
Polymers
Thin films
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Summary:The main challenge in the large-scale commercial applications of benzocyclobutene (BCB) dielectrics is to perform their curing rapidly and efficiently at low temperatures, and in the same time, to obtain large area, high quality, pinhole free dielectric thin films. For that purpose, we investigated numerous uncured and cured BCB films, approximately 2 µm thick, spin-coated on glass/ITO surface, using optical and AFM microscopy, infrared (IR) and Raman spectroscopy, and complete these results with appropriate Linear Combination of Atomic Orbitals (LCAO) calculations. That way we relate microscopic characteristics of the involved molecules, and macroscopic properties of the cured and uncured polymers, which is important for their practical applications.
ISSN:1042-6914
1532-2475
DOI:10.1080/10426910902978811