Surface micromachined tunable 1.55 μm-VCSEL with 102 nm continuous single-mode tuning

For the first time a vertical-cavity surface-emitting laser (VCSEL) with a single-mode wavelength-tuning over 102 nm in the range of 1550 nm is demonstrated. The fiber-coupled optical output power has a maximum of 3.5 mW and is > 2 mW over the entire tuning range. The sidemode suppression ratios...

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Bibliographic Details
Published in:Optics express 2011-08, Vol.19 (18), p.17336-17343
Main Authors: Gierl, C, Gruendl, T, Debernardi, P, Zogal, K, Grasse, C, Davani, H A, Böhm, G, Jatta, S, Küppers, F, Meissner, P, Amann, M-C
Format: Article
Language:English
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Summary:For the first time a vertical-cavity surface-emitting laser (VCSEL) with a single-mode wavelength-tuning over 102 nm in the range of 1550 nm is demonstrated. The fiber-coupled optical output power has a maximum of 3.5 mW and is > 2 mW over the entire tuning range. The sidemode suppression ratios are > 45 dB. The wavelength tuning is achieved with the micro-electro mechanical actuation of a mirror membrane fabricated with surface micro-machining for on-wafer mass production. The mirror membrane consists of low cost dielectric materials (SiOx/SiNy) deposited with low temperature (< 100°C) Plasma Enhanced Chemical Vapor Deposition (PECVD).
ISSN:1094-4087
1094-4087
DOI:10.1364/OE.19.017336