Integrated Carbon Nanotube Array as Dry Adhesive for High-Temperature Silicon Processing

CNT arrays are used as removable dry adhesives for high‐temperature processes with temperatures that increase by as much as 900 °C. The adhesion force between the self‐assembled CNTs is utilized to strain the microstructures in high‐temperature environments. Arrays of analog micromirrors are success...

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Bibliographic Details
Published in:Advanced materials (Weinheim) 2011-10, Vol.23 (37), p.4285-4289
Main Authors: Eun, Youngkee, Lee, Jae-Ik, Choi, Jungwook, Song, Youngsup, Kim, Jongbaeg
Format: Article
Language:English
Subjects:
Adhesives - chemistry
carbon nanotubes
dry adhesives
Electrodes
high-temperature processes
Hot Temperature
Nanotubes, Carbon - chemistry
plastic deformation
Silicon - chemistry
single crystal silicon
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Summary:CNT arrays are used as removable dry adhesives for high‐temperature processes with temperatures that increase by as much as 900 °C. The adhesion force between the self‐assembled CNTs is utilized to strain the microstructures in high‐temperature environments. Arrays of analog micromirrors are successfully fabricated by silicon processing. The proposed method significantly simplifies the fabrication process.
ISSN:0935-9648
1521-4095
DOI:10.1002/adma.201102331