Beam-steering micromirrors for large optical cross-connects

This paper describes Si-micromachined two-axis beam-steering micromirrors and their performance in 256 /spl times/ 256- and 1024 /spl times/ 1024-port large optical cross-connects (OXCs). The high-reflectivity wavelength-independent mirrors are electrostatically actuated; capable of large, continuou...

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Bibliographic Details
Published in:Journal of lightwave technology 2003-03, Vol.21 (3), p.634-642
Main Authors: Aksyuk, V.A., Pardo, F., Carr, D., Greywall, D., Chan, H.B., Simon, M.E., Gasparyan, A., Shea, H., Lifton, V., Bolle, C., Arney, S., Frahm, R., Paczkowski, M., Haueis, M., Ryf, R., Neilson, D.T., Kim, J., Giles, C.R., Bishop, D.
Format: Article
Language:English
Subjects:
Arrays
Camber
Construction
Costs
Direct current
Electric potential
Insertion loss
Micromirrors
Mirrors
Optical attenuators
Optical fiber networks
Optical filters
Optical losses
Stimulated emission
Tilt
Two dimensional
Voltage
Wavelength division multiplexing
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Summary:This paper describes Si-micromachined two-axis beam-steering micromirrors and their performance in 256 /spl times/ 256- and 1024 /spl times/ 1024-port large optical cross-connects (OXCs). The high-reflectivity wavelength-independent mirrors are electrostatically actuated; capable of large, continuous, controlled, dc tilt in any direction at moderate actuation voltages; and allow setting times of a few milliseconds. Packaged two-dimensional (2-D) arrays containing independently addressable identical 256 and 1296 mirrors are used to build fully functional bitrate and wavelength-independent single-stage, low-insertion-loss, single-mode fiber OXC fabrics.
ISSN:0733-8724
1558-2213
DOI:10.1109/JLT.2003.811792