Fabricating of aspheric micro-lens array by excimer laser micromachining

This work presents a unique method for fabricating aspheric micro-lens array based on a KrF 248 nm excimer laser micromachining with precise surface profile control. Based on a planetary contour scanning laser machining method along with a shading metal mask and sample movable stage, an array of mic...

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Bibliographic Details
Published in:Optics and lasers in engineering 2011-09, Vol.49 (9), p.1232-1237
Main Authors: Chiu, Chi-Cheng, Lee, Yung-Chun
Format: Article
Language:English
Subjects:
Arrays
Aspheric micro-lens array
Excimer laser
Excimer lasers
Laser machining
Lasers
Lenses
Micromachining
Scanning
Surface roughness
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Summary:This work presents a unique method for fabricating aspheric micro-lens array based on a KrF 248 nm excimer laser micromachining with precise surface profile control. Based on a planetary contour scanning laser machining method along with a shading metal mask and sample movable stage, an array of micro-lenses with precisely controlled surface profiles can be fabricated. Each lens surface profile can be aspheric and pre-designed. Experiments have been carried out and the machining accuracy of each lens surface profile is examined. Good surface roughness and profile accuracy are observed. ► We present a unique method for fabricating aspheric micro-lens array. ► Each lens surface profile can be aspheric and pre-designed. ► Good surface roughness and profile accuracy are observed.
ISSN:0143-8166
1873-0302
DOI:10.1016/j.optlaseng.2011.04.011