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Programmable nano-switch array using SiN/GaAs interface traps on a GaAs nanowire network for reconfigurable BDD logic circuits

Programmable nano-switch arrays on GaAs-based nanowire networks are investigated for a reconfigurable binary-decision-diagram (BDD) logic circuit. A programmable switch was simply realized by inserting a SiNx thin layer between a metal gate and a nanowire. Fabricated switches were characterized in t...

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Bibliographic Details
Published in:Microelectronic engineering 2011-08, Vol.88 (8), p.2755-2758
Main Authors: Shiratori, Yuta, Miura, Kensuke, Kasai, Seiya
Format: Article
Language:English
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Summary:Programmable nano-switch arrays on GaAs-based nanowire networks are investigated for a reconfigurable binary-decision-diagram (BDD) logic circuit. A programmable switch was simply realized by inserting a SiNx thin layer between a metal gate and a nanowire. Fabricated switches were characterized in terms of hysteresis curve, program time dependences of off-state retention time, and on-state current. HCl treatment on SiNx prior to metal gate formation was found to remarkably improve the switching characteristics. We experimentally demonstrated correct and stable operation of a four-input reconfigurable BDD circuit integrating the switch array with HCl treatment.
ISSN:0167-9317
1873-5568
DOI:10.1016/j.mee.2010.12.007