Short-Channel Characteristics of Self-Aligned [Formula Omitted]-Shaped Source/Drain Ultrathin SOI MOSFETs

• Published in: IEEE transactions on electron devices 2008-06, Vol.55 (6), p.1480-1486
• Main Authors: Lin, Jyi-Tsong, Eng, Yi-Chuen, Huang, Hau-Yuan, Kang, Shiang-Shi, Lin, Po-Hsieh, Kao, Kung-Kai, Lin, Jeng-Da, Tseng, Yi-Ming, Tsai, Ying-Chieh, Tseng, Hung-Jen
• Format: Article
• Language: English
• Subjects: Channels; Degradation; Devices; Drains; Heating; MOSFETs; Silicon substrates; Simulation
• ISSN: 0018-9383; 1557-9646
• DOI: 10.1109/TED.2008.922490

A novel device architecture-the self-aligned pi-shaped source/drain (S/D) ultrathin silicon-on-insulator (UTSOI) FET-is presented for the first time in the field of silicon-on-insulator (SOI) technology; this new device demonstrates how to decrease the self-heating effects in the SOI-based devices. Two-dimensional simulations show that the cost of building an S/D tie into the UTSOI-FET is a modest degradation of the short-channel characteristics including drain-induced barrier lowering (DIBL) and subthreshold swing (SS), when compared with a traditional UTSOI-FET. This degradation occurs because the S/D-tied scheme introduces two additional pathways between the S/D regions and the silicon substrate, thereby reducing the gate's ability to control the channel. Yet, the results presented here show these negative effects to be reasonably small (e.g., DIBL ang 90 mV/V and SS ang 100 mV/dec), whereas the positive effect of reduced self-induced heating is substantial and significantly improves device reliability.