Durability of nitrided fluorocarbon polymer films for nanoimprint lithography

Hydrophobic fluorocarbon polymer films have been used as anti-sticking and releasing coatings for templates in nano-imprint lithography, but have poor durability against repeated high pressure pressing processes. The addition of nitrogen into fluorocarbon-based gas plasma can provide nitrided fluoro...

Full description

Saved in:
Bibliographic Details
Published in:Thin solid films 2011-06, Vol.519 (16), p.5490-5493
Main Authors: Kim, Han-Hyoung, Park, Se-Geun, Lee, El-Hang, Lee, Seung-Gol, O, Beom-Hoan
Format: Article
Language:English
Subjects:
Anti-sticking layer
Cross-disciplinary physics: materials science
rheology
Durability
Exact sciences and technology
Fluorocarbons
Infrared spectroscopy
Lithography
Materials science
Methods of nanofabrication
Nano-imprint lithography
Nano-indentation
Nanocomposites
Nanomaterials
Nanoscale pattern formation
Nanostructure
Nitrided fluorocarbon
Physics
Polymeric films
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Hydrophobic fluorocarbon polymer films have been used as anti-sticking and releasing coatings for templates in nano-imprint lithography, but have poor durability against repeated high pressure pressing processes. The addition of nitrogen into fluorocarbon-based gas plasma can provide nitrided fluorocarbon polymer films, as confirmed by Fourier-transform infrared spectroscopy. Fluorocarbon and nitrided fluorocarbon films have almost the same 110.0° contact angle with water drops. The nitrided fluorocarbon films are harder and significantly enhance durability as anti-sticking layers. Durability enhancement has been confirmed by fabricating replicas with silicon templates using nitrided fluorocarbon anti-sticking layers.
ISSN:0040-6090
1879-2731
DOI:10.1016/j.tsf.2011.03.124